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Growing behavior of AIN thin film deposited by asymmetric bipolar pulsed dc reactive sputtering

Other Titles

비대칭 펄스 직류 반응성 스퍼터링으로 증착된 AIN 박막의 성장 거동

Authors

김주형; 이전국; 안진호

Issue Date

2001-01

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.1, pp.61 - 67

Keywords

AlN; 박막형 고주파 부품; 비대칭 펄스 직류 스퍼터링; pulse frequency; duty cycle; pulsed dc; arc

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/140785

Appears in Collections:

KIST Article > 2001

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