KIST Library Institutional Repository

Decrease of gate leakage current by employing Al sacrificial layer in the DLC-coated Si-tip FEA fabrication

Other Titles

DLC-coated Si-tip FEA 제조에 있어서 Al 희생층을 이용한 게이트 누설 전류의 감소

Authors

주병권; 이상조; 김훈; 이윤희; 오명환

Issue Date

1999-08

Publisher

대한전기학회

Citation

대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.48C, no.8, pp.577 - 579

Keywords

FED; Si-tip field emitter; DLC; gate-leakage current; sacrificial layer; field emission; field emission display

URI

https://pubs.kist.re.kr/handle/201004/142012

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML