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우주항공분야의 초소형 정밀기계

Authors

백경갑; 주병권; 김희중; 오명환

Issue Date

1998-11

Citation

전자부품 = The Electronic Parts & Components Monthly, pp.144 - 152

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/142759

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KIST Article > Others

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