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Si micromachining for MEMS-IR sensor application

Other Titles

결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작

Authors

박흥우; 주병권; 박윤권; 박정호; 김철주; 염상섭; 서상희; 오명환

Issue Date

1998-10

Publisher

한국전기전자재료학회

Citation

TEEM (한국전기전자재료학회), v.11, no.10, pp.815 - 819

Keywords

field emission; MEMS; wafer direct bonding; orientation dependent etching; PbTiO3(PTO) layer; IR sensor; sol-gel

ISSN

1229-7607

URI

https://pubs.kist.re.kr/handle/201004/142818

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KIST Article > Others

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