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Improvement of bonding properties by pre-bonding at room temperature in Si-glass electrostatic bonding process

Other Titles

실리콘 - 유리 정전 열 접합에 있어서 상온 예비 접합에 의한 접합 특성의 개선

Authors

주병권; 이덕중; 이윤희; 이남양; 한정인; 조경익; 오명환

Issue Date

1998-08

Publisher

大韓電氣學會

Citation

전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.47, no.8, pp.1269 - 1276

Keywords

modified electrostatic bonding; hydrophilization; initial Van der Waals bonding; stabilization; Si-glass bonding

ISSN

0254-4172

URI

https://pubs.kist.re.kr/handle/201004/142925

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KIST Article > Others

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