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A study on the chemical vapor deposition of Si on Mo substrate

Other Titles

Mo 기판에서 Si의 화학증착에 관한 연구

Authors

윤진국; 정병성; 고흥석; 김재수; 최종술

Issue Date

1998-07

Publisher

대한금속학회

Citation

대한금속학회지, v.v. 36, no.no. 7, pp.1123 - 1130

Keywords

molybdenum

URI

https://pubs.kist.re.kr/handle/201004/142962

Appears in Collections:

KIST Article > Others

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