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Electrostatic bonding between Si and ITO-coated #7059 glass substrates

Other Titles

실리콘 기판과 ITO가 코팅된 #7059 유리 기판간의 정전 열 접합

Authors

주병권; 정회환; 김영조; 한정인; 조경익; 오명환

Issue Date

1998-05

Publisher

한국센서학회

Citation

센서학회지, v.7, no.3, pp.211 - 218

Keywords

MEMS

ISSN

1225-5475

URI

https://pubs.kist.re.kr/handle/201004/143091

Appears in Collections:

KIST Article > Others

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