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Enhanced relaxation of strain in BF2+ implanted Ge0.06Si0.94

Authors

S. Im*; M. S. Oh; 김효배; 송종한

Issue Date

1998-04

Publisher

한국진공학회

Citation

한국진공학회지, v.2, no.1, pp.37 - 42

Keywords

키워드

ISSN

1225-8822

URI

https://pubs.kist.re.kr/handle/201004/143142

Appears in Collections:

KIST Article > Others

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