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Formation of SiC layer on single crystal Si using hot-filament reactor

Authors

김홍석; 최인훈; 은광용; 백영준

Issue Date

1998-03

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.4, no.1, pp.25 - 27

Keywords

SiC

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/143216

Appears in Collections:

KIST Article > Others

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