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Thermal stabilities of PECVD W-B-N thin films as a diffusion barrier.

Authors

김용태; 김동준; 이창우; 박종완

Issue Date

1997-10

Citation

Multilevel interconnect technology (SPIE)., v.v. 3214, pp.48 - 56

Keywords

thermal stability

URI

https://pubs.kist.re.kr/handle/201004/143561

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KIST Article > Others

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