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Laser direct etching of Al//0//.//3Ga//0//.//7As/GaAs multilayer structures.

Other Titles

Al//0//.//3Ga//0//.//7As/GaAs 다층구조의 레이저 직접 에칭 =

Authors

박세기; 민병돈; 김성일; 김은규; 민석기; 이천; 안병성

Issue Date

1997-05

Citation

응용물리 = The Korean physical society, v.v. 10, no.no. 3, pp.266 - 271

Keywords

알곤이온 레이저

URI

https://pubs.kist.re.kr/handle/201004/143809

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KIST Article > Others

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