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Structure and mechanical properties of nitrogenated diamond-like carbon films deposited by RF-PACVD

Other Titles

RF 플라즈마 CVD에 의해 합성된 질소 함유 다이아몬드성 카본필름의 구조 및 기계적 특성

Authors

이광렬; 은광용

Issue Date

1997-05

Citation

Journal of the Korean vacuum society., v.6, no.2, pp.151 - 158

Keywords

다이아몬드상 카본 필름; 내마모윤활특성

URI

https://pubs.kist.re.kr/handle/201004/143815

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KIST Article > Others

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