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BCl ₃ -NH ₃계의 플라즈마 화학증착공정을 이용한 질화붕소막의 합성

Authors

백영준; 박범수; 은광용

Issue Date

1997-03

Citation

Journal of the Korean ceramic society., v.34, no.3, pp.249 - 256

Keywords

질화붕소

URI

https://pubs.kist.re.kr/handle/201004/143913

Appears in Collections:

KIST Article > Others

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