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압전성 PZT 박막과 Surface micromachining 기술을 이용한 Microelectromechanical system 소자의 제작 공정 및 문제점

Authors

윤영수

Issue Date

1997-01

Citation

요업기술, v.12, no.5, pp.364 - 370

Keywords

MEMS; PZT; 압전 박막; Micromachining

URI

https://pubs.kist.re.kr/handle/201004/144015

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KIST Article > Others

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