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Effects of preferred orientation and microstructure on mechanical properties of chemically vapor deposited SiC.

Other Titles

화학증착 탄화규소막의 방향성과 미세구조가 증착층의 기계적 성질에 미치는 영향 =

Authors

김동주; 김영욱; 박상환; 최두진; 이준근

Issue Date

1995-01

Citation

Journal of the Korean ceramic society = 한국요업학회지, v.v. 32, no.no. 10, pp.1103 - 1110

Keywords

SiC film

URI

https://pubs.kist.re.kr/handle/201004/145365

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KIST Article > Others

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