DC BIASED CAPACITANCE METHOD FOR MEASURING THIN-FILM MAGNETOSTRICTION AND DELTA-EPSILON-EFFECT

Abstract

This paper reports on a method for measuring magnetostriction, Young's modulus of a substrate or film, and Delta E with one apparatus. A substrate with thin magnetic film deposited on it is in parallel with and cantilevered above a metal plate electrode, and they form a capacitive cell. The cantilever deflects due to own weight, applied electric and magnetic fields, The small change of capacitance caused by this deflection is measured by a sensitive capacitance bridge. Young's modulus, magnetostriction, and Delta E effect can be calculated by a theoretical analysis with the measured deflection data.