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Characterization of nitrogen-doped TiO2 thin films prepared by metalorganic chemical vapor deposition

Other Titles

유기금속 화학 기상증착법으로 실리콘 기판위에 증착된 질소치환 TiO2 박막의 특성분석

Authors

이동헌; 조용수; 이월인; 이전국; 정형진

Issue Date

1994-01

Citation

한국요업학회지, v.31, no.12, pp.1577 - 1587

Keywords

MOCVD; TiO2; 질소치환

URI

https://pubs.kist.re.kr/handle/201004/145682

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KIST Article > Others

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