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Low pressure chemical vapor deposition of silicon carbide

Other Titles

탄화규소의 저압 화학증착

Authors

송진수; 김영욱; 김동주; 최두진; 이준근

Issue Date

1994-01

Citation

요업학회지 = Journal of the Korean Ceramic Society, v.31, no.3, pp.257 - 264

Keywords

silicon carbide; chemical vapor deposition; nicalon fiber; composites

ISSN

1225-1372

URI

https://pubs.kist.re.kr/handle/201004/145821

Appears in Collections:

KIST Article > Others

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