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Atomic force microcopy를 이용한 Al0.5Ga0.5As/GaAs 다층 에피층구조의 단면관찰에 관한 연구

Authors

김용; 김희진; 김재성; 김무성; 민석기

Issue Date

1994-01

Citation

응용물리, v.7, pp.124

Keywords

AFM; MOCVD; crossection; observation; stain etching

URI

https://pubs.kist.re.kr/handle/201004/145823

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KIST Article > Others

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