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GaAs 집적회로 제조를 위한 에피 성장 연구

Other Titles

Epitaxial growth for GaAs IC.

Authors

박용주; 김무성; 김용; 조훈영; 김성일; 민석기; 엄경숙

Issue Date

1993-01

Publisher

한국재료학회

Citation

한국재료학회지, v.v. 3, no.no. 6, pp.645 - 651

Keywords

반절연기판; MOCVD; MBE; 누설전류

ISSN

1225-0562

URI

https://pubs.kist.re.kr/handle/201004/146148

Appears in Collections:

KIST Article > Others

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