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Performance of the plasma deposited tungsten nitride diffusion barrier for Al and Au metallization.

Authors

김용태; 이창우; 민석기

Issue Date

1993-01

Citation

Jpn. j. of appl. phys., v.v. 32, pp.6126 - 6131

URI

https://pubs.kist.re.kr/handle/201004/146153

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KIST Article > Others

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