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Chemical amplification resists for microlithography.

Other Titles

고집적 반도체 초미세가공용 화학증폭성 레지스트 =

Authors

안광덕; 정찬문

Issue Date

1993-01

Citation

화학세계, v.v. 33, no.no. 11, pp.835 - 841

URI

https://pubs.kist.re.kr/handle/201004/146273

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KIST Article > Others

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