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SPECTROSCOPIC ELLIPSOMETRIC MEASUREMENTS OF PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION-GROWN SINXINP STRUCTURE

Authors

HAN, IK; LEE, YJ; LEE, JI; KANG, KN; KIM, SY

Issue Date

1992-12-15

Publisher

CHAPMAN HALL LTD

Citation

JOURNAL OF MATERIALS SCIENCE LETTERS, v.11, no.24, pp.1689 - 1691

Keywords

SILICON-NITRIDE; SILICON-NITRIDE

ISSN

0261-8028

URI

https://pubs.kist.re.kr/handle/201004/146336

DOI

10.1007/BF00736210

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KIST Article > Others

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