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마이크로 박막 센서의 기술동향

Authors

오명환; 주병권

Issue Date

1992-02

Citation

전기학회지 ., v.41, no.2, pp.6 - 11

Keywords

MEMS; micromachining; microsensor

URI

https://pubs.kist.re.kr/handle/201004/146475

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KIST Article > Others

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