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Fabrication of ceramic thin films by PVD process

Other Titles

PVD 공정에 의한 세라믹 박막의 제조

Authors

김태송; 오명환; 김종희

Issue Date

1992-01

Citation

Ceramics, v.7, no.3, pp.241 - 247

Keywords

ceramics; PVD process; thin films

URI

https://pubs.kist.re.kr/handle/201004/146513

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KIST Article > Others

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