KIST Library Institutional Repository

Process for the Measurement of Radio-Frequency Induced Plasma

Other Titles

고주파 유도 플라즈마의 계측 프로세스

Authors

김대준; 이형직; 전명철; 윤상옥

Issue Date

1992-01

Citation

요업재료의 과학과 기술, pp.178 - 188

Keywords

plasma; high frequency; measurement

URI

https://pubs.kist.re.kr/handle/201004/146596

Appears in Collections:

KIST Article > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML