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PECVD 방법에 의해 제작된 SiNx/InP MIS 구조의 bias stress 에 의한 C-V 및 G-V 곡선의 변화 .

Authors

강광남; 이정일; 이명복; 한일기; 이유종

Issue Date

1992-01

Citation

새물리, v.v. 32, no.no. 2, pp.252 - ?

Keywords

MIS 구조

URI

https://pubs.kist.re.kr/handle/201004/146631

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KIST Article > Others

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