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Filling-up effect of micro-gap by interfacial oxide growing in SFB process

Other Titles

SFB 공정시 계면 산화막의 성장에 의한 micro-gap의 메움 효과

Authors

강광남; 주병권; 이재옥; 김철주; 오명환; 차균현; 이명복

Issue Date

1991-08

Citation

전자공학회논문지, v.28A, no.2, pp.71 - 76

Keywords

interfacial oxide growing

URI

https://pubs.kist.re.kr/handle/201004/146760

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KIST Article > Others

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