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플라즈마화학증착 텅스텐박막의 특성에 미치는 H//2/WF//6 입력비의 역활 .

Authors

김용태; 민석기; 홍종성; 강태원; 홍치유

Issue Date

1991-01

Citation

새물리, v.v. 31, pp.569 - 573

URI

https://pubs.kist.re.kr/handle/201004/146873

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KIST Article > Others

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