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플라즈마 Silane 환원반응에 의한 텅스텐박막의 증착 .

Authors

김용태; 민석기; 홍종성; 홍치유

Issue Date

1991-01

Citation

전자공학회논문지, v.v. 28A, no.no. 2, pp.134 - 141

URI

https://pubs.kist.re.kr/handle/201004/146967

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KIST Article > Others

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