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Fabrication and characterization of miniature Si pressure sensor.

Other Titles

소형 Si 압력센서의 제작 및 특성 평가 =

Authors

강광남; 이정일; 이명복; 주병권; 김형곤; 오명환

Issue Date

1990-11

Citation

전자공학회논문지, v.v. 27, no.no. 11, pp.62 - 68

Keywords

pressure sensor

URI

https://pubs.kist.re.kr/handle/201004/147034

Appears in Collections:

KIST Article > Others

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