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Consideration on the anisotropic etching states of Si and application to the fabrication of micromechanic structures for integrated sensor.

Other Titles

실리콘의 비등방성 식각상태의 고찰과 집적 센서용 미세기계 구조 제작에의 응용 =

Authors

김형곤; 오명환; 주병권; 이윤희

Issue Date

1990-01

Citation

전자학회 논문지, v.제 39 권, pp.75 - 82

URI

https://pubs.kist.re.kr/handle/201004/147215

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KIST Article > Others

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