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이온주입된 실리콘의 excimer laser annealing 효과 .

Authors

김성일; 김은규; 김용태; 김춘근; 김무성; 민석기

Issue Date

1989-01

Citation

응용물리, v.v. 2, no.no. 2, pp.129 - 135

Keywords

laser annealing; silicon

URI

https://pubs.kist.re.kr/handle/201004/147454

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KIST Article > Others

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