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Thermally stable, deep UV resist materials.

Authors

안광덕; S. R. Turner; C. G. Willson

Issue Date

1987-01

Citation

Polymers for high technology - electronics and photonics : ACS symposium series, v.v. 346, pp.200 - 210

URI

https://pubs.kist.re.kr/handle/201004/147809

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KIST Article > Others

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