Dependence of the intermixing of InGaAs/InGaAsP quantum well in impurity free vacancy disordering on the NH3 flow rate for the growth of SiNx capping

Authors
Choi, Won Jun
Issue Date
2000-10-01
Citation
미국, pp.0
URI
https://pubs.kist.re.kr/handle/201004/84325
Appears in Collections:
KIST Conference Paper > 2000
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