| 2005-09 | High-resolution inchworm linear motor based on electrostatic twisting microactuators | Kim, SH; Hwang, IH; Jo, KW; Yoon, ES; Lee, JH |
| - | Hybrid microassembly system for three-dimensional MEMS components | KIM KYUNG HWAN; KIM DEOK HO; SEOK JOO YI; 이재훈 |
| 1991-01 | IC 기술을 이용한 자동차용 실리콘 가속센서 | 주병권; 오명환 |
| - | Implementation of a self-sensing MEMS cantilever for nanomanipulation | KIM DEOK HO; KIM KYUNG HWAN; 홍재완 |
| - | Improvement of field emission properties by Nb-silicide formation on Si-tip FEAs | 박재석; 이상조; Ju Byeong Kwon; OH MYUNG HWAN; 장진 |
| - | Improvement of field-emission properties by formation of Nb-silicide layer on silicon-tip FEAs | J. S. Park; S. Lee; Ju Byeong Kwon; OH MYUNG HWAN; J. Jang; D. Jeon |
| 2005-04 | Improvement of the mass sensitivity in flexural plate wave biosensor based on PZT thin film | Lee, YS; Yoon, DS; Kim, TS |
| - | In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber | 최우범; Ju Byeong Kwon; LEE YUN HI; 정지원; OH MYUNG HWAN; 정성재; LEE NAM YANG; 한정인; 조경익; 성만영 |
| 1998-12 | Influence of interface structure on chemical etching process for air gap of microelectromechanical system based on surface micromachining | Yoon, YS; Kim, JH; Polla, DL; Shin, YH |
| 2010-02 | Insights into the reactive ion etching mechanism of nanocrystalline diamond films as a function of film microstructure and the presence of fluorine gas | Yoon, Ju-Heon; Lee, Wook-Seong; Park, Jong-Keuk; Hwang, Gyu Weon; Baik, Young-Joon; Seong, Tae-Yeon; Jeong, Jeung-Hyun |
| - | Large area 3D nanoscale metal etching process | Kim Moo Hyun; Lee, Byung Chul; C. Jegatha; Kim Sang Kyung; Shin, Hyun Joon; Kim, Jung Sik; Moon, Sung Wook |
| 2008-03 | Low frequency properties of micro power generator using a gold electroplated coil and magnet | Kim, S.-I.; Lee, D.H.; Lee, Y.P.; Chang, Y.S.; Park, M.-C. |
| - | Low Resonance Frequency MEMS Piezoelectric Energy Harvester with Shear Mode | Song, Hyun - Cheol; KANG, CHONG YUN; YOON, SEOK JIN |
| - | Low Resonance Frequency Piezoelectric MEMS Harvester with Shear Mode | Song, Hyun - Cheol; Lee Woon Hee; KANG, CHONG YUN; YOON, SEOK JIN |
| - | Low-cost fabrication of high aspect ratio metallic structure for optical switch application using UV-LIGA process | 채경수; 정대석; 김종용; 김태엽; Shin Hyun Joon; 문성옥; OH MYUNG HWAN |
| 2001-08 | MEMS 기술의 개요 및 전망 | 주병권 |
| - | MEMS fabrication of multi-channel type microfluidic chip for electrokinetic potential devices | Myung-Suk Chun |
| 2004-02 | MEMS 공정에 의해 제작된 PZT 마이크로 켄틸레버의 전기기계적 거동 및 질량에 대한 공진특성 분석 | 황교선; 이정훈; 박정호; 김태송 |
| 2000-12 | MEMS 기술을 이용한 감지 및 제어기의 기술동향 | 박세광; 김태송 |
| 2004-03 | MEMS 적용을 위한 Thermal CVD 방법에 의해 증착한 SiC막의 반응성 이온 Etching 특성 평가 | 최기용; 최덕균; 박지연; 김태송 |
| 2018-05 | MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H-2 Detection with Low Power Consumption | Kwak, Seungmin; Shim, Young-Seok; Yoo, Yong Kyoung; Lee, jin hyung; Kim, Inho; Kim, Jinseok; Lee, Kyu Hyoung; Lee, Jeong Hoon |
| - | MEMS-IR sensor fabrication and characterization | Ju Byeong Kwon; 박흥우; 박윤권; PARK JEONG HO; 김철주; Sang-Seop Yom; SUH SANG HEE; OH MYUNG HWAN |
| 1999-01 | MEMS/FED packaging 기술 동향 (I) : 기판 접합 공정 중심으로 | 주병권; 오명환 |
| 1999-02 | MEMS/FED packaging 기술 동향 (II) : 기판 접합 공정 중심으로 | 주병권; 오명환 |
| - | Micro power generation based on thermal bubbles | Kim, Ho-Young; LEE, HEON JU; Chang, Young Soo; Lee, Yoon Pyo |
| - | Micro-SOFC Membranes with AAO as the Electrode Template | Kwon Chang Woo; Son, Ji-Won; Lee, Jong Ho; Lee, Hae-Weon; Ki-Bum Kim |
| - | Micro-tunneling sensor for vacuum level evaluation of field emission display | 박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN |
| - | Micro-tunneling sensors for vacuum level evaluation of field emission display devices | 박흥우; Ju Byeong Kwon; 박윤권; 김철주; OH MYUNG HWAN |
| 2000-02 | Microelectromechnical system 소자를 위한 박막형 2차 전지용 SnO2 음극 박막의 충방전 특성 평가 | 남상철; 조원일; 전은정; 신영화; 윤영수 |
| 1997-09 | Micromachined semi-encapsulated spiral inductors for microelectromechanical systems (MEMS) applications | Sadler, DJ; Zhang, WJ; Ahn, CH; Kim, HJ; Han, SH |
